| Quantity | Module | Tool | Description | Model |
| 2 | Ash | RESIST-REM | PRS RESIST REMOVER 800 | PRS800 |
| 2 | Clean | ACID-PROC | MEGASONIC | Dolphin |
| 1 | Clean | CHEM-BENCH | CHEMICAL BENCH : HF | NA |
| 1 | Clean | CHEM-BENCH | CHEMICAL BENCH : BOMBA | NA |
| 30 | Clean | SEMITOOL | SRD | |
| 1 | Clean | SEMITOOL | RECIF SINGLE WAFER SPINNER | |
| 1 | Clean | Others | APT | |
| 1 | Clean | Others | Wet Bench | |
| 1 | Clean | Mask Washing | Hamatech | |
| 1 | Clean | CHEM-BENCH-Mega | MEGASONIC | |
| 1 | Clean | CHEM-BENCH | BOMBA BENCH | NA |
| 2 | Clean | CHEM-BENCH | ULTRAT PLATE CLEANER 602 | NA |
| 1 | Clean | CHEM-BENCH | NEG MASK CLEANING BENCH | |
| 1 | Clean | CHEM-BENCH | POS MASK CLEANING BENCH | |
| 1 | Clean | Others | SOG Clean Bench | |
| 6 | Clean | SVG Scrubber | SVG SRCUBBER | Scrubber |
| 53 | Clean Items | |||
| Quantity | Module | Tool | Description | Model |
| stack 1 | DIFF | FURNACE | CL2 OX | TMX4500 |
| DIFF | FURNACE | CL2 OX | TMX4500 | |
| DIFF | FURNACE | CL2 OX | TMX4500 | |
| DIFF | FURNACE | CL2 OX | TMX4500 | |
| stack 2 | DIFF | FURNACE | P-WELL | TMX4500 |
| DIFF | FURNACE | P-WELL | TMX4500 | |
| DIFF | FURNACE | P-WELL | TMX4500 | |
| DIFF | FURNACE | P-WELL | TMX4500 | |
| Stack 3 | DIFF | FURNACE | THKCL1 | TMX4500 |
| DIFF | FURNACE | P-WELL | TMX4500 | |
| DIFF | FURNACE | LTO-POLY | TMX4500 | |
| DIFF | FURNACE | LTO-POLY | TMX4500 | |
| Stack 4 | DIFF | FURNACE | DIFF SINK | TMX4500 |
| DIFF | FURNACE | DIFF SINK | TMX4500 | |
| DIFF | FURNACE | DIFF SINK | TMX4500 | |
| DIFF | FURNACE | PH1000 PRED | TMX4500 | |
| Stack 5 | DIFF | FURNACE | DIFF SINK | TMX4500 |
| DIFF | FURNACE | DIFF SINK | TMX4500 | |
| DIFF | FURNACE | DIFF SINK | TMX4500 | |
| DIFF | FURNACE | DIFF SINK | TMX4500 | |
| Stack 6 | DIFF | FURNACE | D-EMITTER | TMX4500 |
| DIFF | FURNACE | D-EMITTER | TMX4500 | |
| Stack 6.5 | DIFF | FURNACE | D-EMITTER | TMX4500 |
| DIFF | FURNACE | D-EMITTER | TMX4500 | |
| Stack 7 | DIFF | FURNACE | ANTIMONY | TMX4500 |
| DIFF | FURNACE | ANTIMONY | TMX4500 | |
| DIFF | FURNACE | ANTIMONY | TMX4500 | |
| DIFF | FURNACE | ANTIMONY | TMX4500 | |
| Stack 8 | DIFF | FURNACE | POCL3 / PEM | TMX4500 |
| DIFF | FURNACE | POCL3 / PEM | TMX4500 | |
| DIFF | FURNACE | POCL3 / PEM | TMX4500 | |
| DIFF | FURNACE | POCL3 / PEM | TMX4500 | |
| Stack 9 | DIFF | FURNACE | P-S LEACH | TMX4500 |
| DIFF | FURNACE | BN PBASE | TMX4500 | |
| DIFF | FURNACE | BN PBASE | TMX4500 | |
| DIFF | FURNACE | BN PBASE | TMX4500 | |
| Stack 10 | DIFF | FURNACE | D-BASE | TMX4500 |
| DIFF | FURNACE | D-BASE | TMX4500 | |
| DIFF | FURNACE | BN PBASE | TMX4500 | |
| DIFF | FURNACE | BN PBASE | TMX4500 | |
| Stack 11 | DIFF | FURNACE | P-S LEACH | TMX4500 |
| DIFF | FURNACE | BN P+ | TMX4500 | |
| DIFF | FURNACE | BN P+ | TMX4500 | |
| DIFF | FURNACE | BN P+ | TMX4500 | |
| Stack 12 | DIFF | FURNACE | P DIFF-P+/SOAK ISO | TMX4500 |
| DIFF | FURNACE | BN P ISO | TMX4500 | |
| DIFF | FURNACE | BN P ISO | TMX4500 | |
| DIFF | FURNACE | BN P ISO | TMX4500 | |
| Stack 13 | DIFF | FURNACE | D-BASE | TMX5000 |
| DIFF | FURNACE | N 1ST OX | TMX5000 | |
| DIFF | FURNACE | N 1ST OX/2ND OX | TMX5000 | |
| Stack 14 | DIFF | FURNACE | N 1ST OX/2ND OX | TMX4500 |
| DIFF | FURNACE | N 1ST OX/2ND OX | TMX4500 | |
| DIFF | FURNACE | N 2ND OX | TMX4500 | |
| DIFF | FURNACE | N 2ND OX | TMX4500 | |
| Stack 15 | DIFF | FURNACE | PDIFF BN BASE | TMX4500 |
| DIFF | FURNACE | NDIFF PHOS EM | TMX4500 | |
| DIFF | FURNACE | NDIFF PHOS EM | TMX4500 | |
| DIFF | FURNACE | NDIFF PHOS BASE | TMX4500 | |
| Stack 16 | DIFF | FURNACE | PDIFF BN BASE | TMX4500 |
| DIFF | FURNACE | INITIAL OXIDATION | TMX4500 | |
| DIFF | FURNACE | INITIAL OXIDATION | TMX4500 | |
| DIFF | FURNACE | INITIAL OXIDATION | TMX4500 | |
| Stack 17 | DIFF | FURNACE | LEGA | Tystar |
| DIFF | FURNACE | LEGA | Tystar | |
| DIFF | FURNACE | LEGA | Tystar | |
| DIFF | FURNACE | LEGA | Tystar | |
| Stack 18 | Diff | CVD - LTO | LTO-VAP | TMX4500 |
| Diff | CVD - LTO | LTO-VAP | TMX4500 | |
| Stack 18.5 | Diff | CVD - LTO | LTO-PVAP | TMX4500 |
| Diff | CVD - LTO | LTO-PVAP | TMX4500 | |
| Stack 19 | Diff | FURNACE | ASM-LEGA | Pyro/Fusion |
| Diff | FURNACE | ASM-LEGA | Pyro/Fusion | |
| Diff | LPCVD - Pyro/Fusion | ASM-FUS | Pyro/Fusion | |
| Diff | LPCVD - Pyro/Fusion | ASM-PYRO | Pyro/Fusion | |
| Stack 20 | Diff | LPCVD - Pyro/Fusion | ASM-PYRO | Pyro/Fusion |
| Diff | LPCVD - Pyro/Fusion | ASM-FUS | Pyro/Fusion | |
| Diff | LPCVD - Pyro/Fusion | ASM-FUS | Pyro/Fusion | |
| Diff | LPCVD - Pyro/Fusion | ASM-PYRO | Pyro/Fusion | |
| 20-4 stacks | Diff total | |||
| Quantity | Module | Tool | Description | Model |
| 1 | Etch | ETCH-SPIN | SEZ RST 100 SPIN ETCHER | RST100 |
| 1 | ETCH | CHEM-BENCH | FRECKLE ETCH BENCH | NA |
| 1 | ETCH | DRY-ETCHER | LAM 690 ETCHER | 690 |
| 4 | ETCH | DRY-ETCHER | TEGAL 903E | 903E |
| 2 | ETCH | DRY-ETCHER | TEGAL 901 | 901 |
| 9 | Etch total | |||
| 2 | IMPLANT | IMPLANTER | IMPLANTER : EATON NV10 | NV10 |
| 21 | Litho | ALIGN | PERKIN ELMER 550 | 550-651HT |
| 12 | Litho | ALIGN | CANON PLA | PLA |
| 33 | Litho total | |||
| 9 | Metals | TF - Varian | VAR-3190 | 3190 |
| 4 | Metals | TF - Varian | VAR-3180 | 3180 |
| 13 | Metal total | |||
| Quantity | Module | Tool | Description | Model |
| 1 | Metro | Scope | SCOPE | INM100 |
| 1 | Metro | Scope | MICROSCOPE | Lergolux |
| 2 | Metro | Mask inspect | KLA | 208/209 |
| 1 | Metro | Profilometer | TENCOR ALPHA-STEP | Alpha Step |
| 1 | Metro | Surfscan | TENCOR SURFSCAN 4000 | 4000 |
| 14 | Metro | Microscope+Loader | MICROSCOPE | Lergolux |
| 1 | Metro | Microscope | SCOPE | Lergolux |
| 1 | Metro | Microscope+Loader | SCOPE | |
| 2 | Metro | Loader | ICE AUTO WAFER LOADER | |
| 1 | Metro | FTIR | QS500 FTIR SPECTORMETER | QS500 |
| 1 | Metro | Others | RTP Measure | AG Associates |
| 1 | Metro | Surfscan | TENCOR SURFSCAN 5000 | 5000 |
| 27 | Metro total | |||
| 5 | Oven | Others | Oven | |
| 1 | Support | Others | Wafer sorter | |
| 2 | Support | Wafer Transfer | COMET | R2D - 2X50 |
| 14 | Support | Wafer Transfer | Matronix | |
| 19 | Support | Wafer Transfer | RAPITRAN | |
| 36 | Support total | |||
| 14 | Track | Developer MTI Track | MTI DEV TARGET TRACK | Target Track TM |
| 1 | Track | Developer MTI Track | MTI DEV MFAB TARGET TRACK | Multi Fab Target Track |
| 2 | Track | HOT-PLATE | SVG HOT PLATE (SOG) | SVG86 |
| 1 | Track | SVG Coat/Dev | SVG COAT/DEV TRACK | SVG86 |
| 18 | Track items | |||
| 33 | xDIFF | spare part tube sys. | Various | TMX4500 |