6" manufacturing fab- live tools, 150mm, SMIF, move out began in October 09.  Contact us for additional information, complete specs and photos!
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FAB-FINDER AVAILABLE 6" FABS 

Updated on January 31, 2010 

One Complete Live Fab and One List of Available Misc 150mm tools
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30 150mm tools, live and running in Fab-move outs started Oct.09.
See list below, some tools are SMIFFed, all tools lightly used for specialty electronics products.

Fab-Finder exclusive
Live Fab!



Call us for details! Private sale, you will not see this advertized anywhere else.

Item Module Model-Type Maker Vintage
1 Ash System One Stripper model 10x Matrix  1990
2 Cleans Magnum, wet BEOL Polymer Removal Semitool 1998
3 Cleans ST 270F-R SRD Semitool 1991
4 Diffusion Bruce BDF-41 Kokusai / BTU 1990
5 Diffusion Bruce BDF-41 Kokusai / BTU 1990
6 Diffusion Bruce BDF-41 Kokusai / BTU 1990
7 Diffusion Bruce BDF-41 Kokusai / BTU 2000
8 Etch Precision 5000 MarkII Applied Materials (AMAT) 1998
9 Etch Precision 5000 MarkII Applied Materials (AMAT) 1998
10 Etch 384T Triode etcher System Drytek 1990
11 Etch AutoEtch Bulkhead Plasma etch System LAM Research 1988
12 Etch System One Etcher model 302 Matrix  1985
13 Etch Tegal 903e etcher system Tegal 1995
15 Etch Tegal 6520 HRe Alu etch system Tegal 1995
16 Implanter NV-GSD-180 Eaton 1991
17 Implanter NV-6200A Eaton 1990
18 Metrology SpectraLaser 200 film metrology system Rudolph 1999
20 Metrology System One Etcher model 303 Matrix  1992
22 Metrology Stereomicroscope Nikon 1999
23 Metrology Ergolux AMC Leica  
28 Metrology SCA- 2500 (w. waferloader AL-1) SemiTest 1998
29 Metrology CD SEM S-8620 Hitachi Ltd. 1996
30 Reactor Endura P5000 Applied Materials (AMAT) 1998
31 RTP AST 2800 eR. STEAG RTP Systems 2000
33 Support Wafer loader NWL-641 Nikon 1995
1998
1996
1995
1998
1996
34 Support 6" POD and Carrier Asyst / Fluorware div.
35 Support PST DP2150SI INX Progressive System Technologies 1997
36 Thin Film SOG Coater SCW-60A-AVFG Dainippon screen 1994
37 Thin Film Concept One PECVD system Novellus 1990
38 Thin Film Concept One PECVD system Novellus 1990

 

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59  150mm Misc systems.  All in good condition

Please contact us for more details.

# Area Serial Number Supplier Equipment model
1 PHOTO 1527 ULTRATECH STEPPER - G_LINE UT1500
2 ETCHING 10899 TEGAL OXIDE ETCH T903
3 ETCHING 11193 TEGAL POLY ETCH T903
4 ETCHING PU4I104J AXCELLIS UVH - UV_HARD FUS200 PCU
5 ETCHING PA5F712BR AXCELLIS CURING UVHRD 150 PCU
6 ETCHING 587 AXCELLIS CURING UVHRD 150 PCU
7 ETCHING 489 AXCELLIS CURING UVHRD 150 PCU
8 ETCHING N/A AXCELLIS CURING UVHRD 150 PCU
9 ETCHING M949 LAM POLY LAM 490
10 WET N/A ROBOTANK ROBOTANK WET BENCH
11 WET 49276 VERTEQ VERTEQ  COBRA –VCS-SA-PDC
12 IMPLANT PU4L116J AXCELLIS UVH - UV_HARD FUS200 PCU
13 CVD 5851 AMAT CVD - CVD_MXP/SPACER MXP+ P5000
14 CVD 5619 AMAT CVD - CVD_PASSIVATION P5000
15 ETCHING 319 MATTSON STRIPPING - MATTSON / ASPEN ICP SM MATTSON
16 ETCHING 379 MATTSON STRIPPING - MATTSON / ASPEN ICP SM MATTSON
17 ETCHING 664 MATTSON STRIPPING - MATTSON / ASPEN ICP SM MATTSON
18 WET 0904.0134.0397 FSI WET - EXCALIB FSI EXCALIBUR
19 DIFF AJ557L THERMCO FURNACE ATMO - HYDROX/REFLOW 6" HORIZ FURN
20 ETCHING 409313-X2 AMAT CENTURA TRENCH ETCH    4 chbrs          KODAK
21 CVD 9999 AMAT CENTURA SOG ETCHBACK   3 chbrs CENTURA
22 CVD 9472 AMAT CENTURA SOG ETCHBACK   3 chbrs CENTURA
23 CVD 3012 AMAT P5000/TEOS MAIN 2 chbrs 1DEP/1EB P5000
24 PHOTO RT-CAB000317-902 SVG CUR pix bake SVG88
25 CVD 4016 AMAT CVD_TEOS/SION (1T+2N) P5000
26 CVD O120 AMAT CVD_SPUTT (1T+2EB) P5000
27 PHOTO 8708CAB03 SVG CURING_SOG SVG88
28 ETCHING 3373 LAM LAM_POLY / 4420 CLAMP LAM4420
29 ETCHING 3231 LAM LAM_POLY / 4420 CLAMP LAM4420
30 ETCHING 20056 LAM LAM_POLY / 4420 CLAMP LAM4420
31 ETCHING 2920 LAM LAM_POLY / 4420 CLAMP LAM4420
32 ETCHING 2919 LAM LAM_POLY / 4420 CLAMP LAM4420
33 ETCHING 2430 LAM LAM 4420 ESC LAM4420
34 ETCHING 2450 LAM LAM 4420 ESC LAM4420
35 ETCHING 2820 LAM LAM 4420 ESC LAM4420
36 DIFF 02-19004 SVG WET/DRY OX MEDIUM T. 6" HORIZ FURN
37 DIFF DSAI- THERMCO OX GATE 6" HORIZ FURN
38 ETCHING   AMAT ALU ETCH AS SPARE PARTS AMAT8330
39 BACKFINISH   DISCO GRINDER - DISCO DFG83
40 ETCHING 92171 NOVELLUS NOVELLUS-Gasonics IPC3300
41 ETCHING 2323 LAM LAM / 4420 CLAMP LAM4420
42 ETCH 50047  SPM Automatic Bold Etch Bench  RESIST STRP BENCH
43 MASK 204250 CANON CANON FPA-1550-MIV-W
44 MASK 305264 CANON CANON FPA-1550-MIV-W
45 ETCH 109 AXCELIS FUSION M200 PC
46 ETCH 92321 AXCELIS FUSION 200 AC
47 IMP 136 AXCELIS EATON NV10/80
48 IMP 123 AXCELIS EATON NV10/80
49 MASK 53700-3054 DNS TRACK 80B
50 BKFN   DISCO DISCO : DFG 83 DISCO : DFG 83
51 ETCH   FUSION Fusion 150 Fusion 150
52 ETCH   FUSION Fusion 150 Fusion 150
53 ETCH   FUSION Fusion 150 Fusion 150
54 ETCH   FUSION Fusion 150 Fusion 150
55 Metrology   Hologenix Hologenix SLIPFINDER Hologenix SLIPFINDER
56 Metrology   KLA-TENCOR KLA5105 KLA5105
57 METRO 1031 KT CD SEM ECD1
58 METRO 10789 RUDOLPH ELLIPSO AS SPARE PARTS FE7
59 DCVD 308151 AMAT APPLIED MATERIALS CENTURA
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