Updated June 24, 2010
One Complete Live Fab, One partial Live Fab and One List of Available Misc 150mm tools, see below for more details
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One Complete and Live Fab - Please contact us for details
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30 150mm tools, live and running in Fab-move outs started Oct.09.
See list below, some tools are SMIFFed, all tools lightly used for specialty electronics products.
Call us for details!
Item
Module
Model-Type
Maker
Vintage
1
Ash
System One Stripper model 10x
Matrix
1990
2
Cleans
Magnum, wet BEOL Polymer Removal
Semitool
1998
3
Cleans
ST 270F-R SRD
Semitool
1991
4
Diffusion
Bruce BDF-41
Kokusai / BTU
1990
5
Diffusion
Bruce BDF-41
Kokusai / BTU
1990
6
Diffusion
Bruce BDF-41
Kokusai / BTU
1990
7
Diffusion
Bruce BDF-41
Kokusai / BTU
2000
8
Etch
Precision 5000 MarkII
Applied Materials (AMAT)
1998
9
Etch
Precision 5000 MarkII
Applied Materials (AMAT)
1998
10
Etch
384T Triode etcher System
Drytek
1990
11
Etch
AutoEtch Bulkhead Plasma etch System
LAM Research
1988
12
Etch
System One Etcher model 302
Matrix
1985
13
Etch
Tegal 903e etcher system
Tegal
1995
15
Etch
Tegal 6520 HRe Alu etch system
Tegal
1995
16
Implanter
NV-GSD-180
Eaton
1991
17
Implanter
NV-6200A
Eaton
1990
18
Metrology
SpectraLaser 200 film metrology system
Rudolph
1999
20
Metrology
System One Etcher model 303
Matrix
1992
22
Metrology
Stereomicroscope
Nikon
1999
23
Metrology
Ergolux AMC
Leica
28
Metrology
SCA- 2500 (w. waferloader AL-1)
SemiTest
1998
29
Metrology
CD SEM S-8620
Hitachi Ltd.
1996
30
Reactor
Endura P5000
Applied Materials (AMAT)
1998
33
Support
Wafer loader NWL-641
Nikon
1995
1998
1996
1995
1998
1996
34
Support
6" POD and Carrier
Asyst / Fluorware
div.
35
Support
PST DP2150SI INX
Progressive System Technologies
1997
36
Thin Film
SOG Coater SCW-60A-AVFG
Dainippon screen
1994
37
Thin Film
Concept One PECVD system
Novellus
1990
38
Thin Film
Concept One PECVD system
Novellus
1990
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20 150mm Misc systems. All in good condition
Please contact us for more details.
SUPPLIER
EQUIPMENT MODEL
AVAILABILITY
FUSION
M200 PC
Immediate
FUSION
200 AC
Immediate
TEGAL 903
TEGAL903_PLANA
Immediate
TEGAL 903
TEGAL903_PLANA
Immediate
SVG DOUBLE COAT PZT
SVG86
Immediate
SVG DOUBLE COAT PZT
SVG86
Immediate
SVG DOUBLE COAT PZT
SVG86
Immediate
SVG DOUBLE COAT PZT
SVG86
wk18
SVG DOUBLE COAT PZT
SVG86
wk17.1
RTP
MATTSON 2900
Immediate
OVEN
OVEN
wk19
Meta Stripping
EKC / AEM
wk19
Tegal parts washing Bench
WET BENCH
W19
Tegal parts washing Bench
WET BENCH
W19
FUSION
FUSION 200 CU/POLO
Immediate
NOVELLUS AURA1000
5.31
W16.1
NOVELLUS AURA1000
5.31
Immediate
TEGAL
TEGAL 901E
Immediate
Test Wafer Management
WET BENCH
W19 - Alu
PZT thickness
Shimadzu AUW220D
wk19
