| FF # | Type | Maker | Model Name/# | Part or S/N | Status | Qty. | Description | |||||
| Furn1 | LPCVD Furnace | NorCal | S.S. Cold trap for LPCVD exhaust system, FTW3-8-3002-ISO | 290006 | New | 1 | ISO 80 flanges, 200mm dia., approx. 14.5" length, serpentine cold tube path inside trap | |||||
| Furn2 | LPCVD Furnace | SFP | 316 S.S. tubing for exhaust system | na | New | 12 | 12 pieces 316 S.S. tubing for LPCVD exhaust system, elbows (one run with 90' bend, 2 KLF 40mm ends), all have 3.5 inch run elbow, run lengths are 4 @ 8 inches, 4 @ 21.5 inches, 4 @ 32 inches | |||||
| Furn4 | LPCVD or Diffusion Furnaces | MRL | Motor Contoller/Power Unit Part# 9200954549 R RMA | 1-92019252060109 1-no serial # | Re-furb | 2 | MRL Motor Contollers/Power Unit (for fron end cantilever loaders) paperwork says sent for repair to MRL but no issues found | |||||
| Furn5 | Diffusion Furnace | Sci-Tech Glassblowing | Quartz drip trays for PoCL3/Boron doping furnaces | na | New | 3 | New quartz drip trays for PoCL3/Boron diffusion furnaces | |||||
| WS2 | Wire Saw | HCT | Wire spools for 480DU wire saws | na | New | 2 | Wire spools for HCT 480DU systems. | |||||
| WS3 | Wire Saw | HTC | Rollers for 480/400DU wire saws | na | need re-groving | 8 sets of 4 (32 rollers) | These are the rollers that the saw wires are wrapped around to provide the driving motion and precise placement of the wires to the ingots. | |||||
| WS6 | Wire Saw | HCT | Wire pool shafts | new | 6 | Wire pool shafts for HCT 480DU saws | ||||||
| A-1 | Automation | Parker | Rodless Actuator, ERB80-B01NA99-FSR826-A145 | 270657-053006-001 | New | 1 | Rodless Actuator, AC servo motor Yaskawa 400W SGM-04VGNK52, ball screw 1.000" in lead, 1:1 drive ratio, roller bearing carriage (240mm length), 826mm stroke, 1210mm length, have manual | |||||
| A-2 | Automation | Yaskawa | AC Servo Motor, SGM-04VGNK52 | DC04ZH501910013 | New | 1 | AC Servo motor, 400W, 200V, 2.6A, N-m 1.27, r/min 3000 (used with Adept robotic systems and other precision placement systems) | |||||
| A-3 | Automation | Adept | Smart Amp and mounting bracket p/n 30410-10000 | 410-004217 | New | 1 set | Smart Ampand mouting bracket for use with Yaskawa servor motor (above) have manual | |||||
| A-4 | Automation | SMC | Pneumatic Gripper, MHL-2-20DI | na | New | 2 | Pneumatic gripper, automated catch and release placement device, 5.25" to 9.5" travel | |||||
| A-5 | Automation | Industrial Devices Corp. | Electric Cylinder, NX-10-5B-12-MF1-FT1-ELE43X | 020205A112634 | New | 1 | Electric cylinder, 17.5" length, about 12-15" stroke, has drive belt, no motor | |||||
| A-6 | Automation | T-Squared | End Effector Vacuum Arm p/n TS1119 | na | New/re-furb | 3 | Twin arm vacuum wand end effector, span is 10 inches, was in use with Adept robotics for twin product (6inch wafers) pick up and place | |||||
| A7 | Automation | Adept | Cable sets for robots/controllers | 905060-00005 rev A 10861-01330 rev B | New | 1 set | Robot arm cable kits, for Cobra or Viper Robots | |||||
