Ebara FREX200 Chemical Mechanical Polish tools!
Two OEM inspected and certified units for immediate sale! Please contact us for pricing and additional information!
Two OEM inspected and certified units for immediate sale! Please contact us for pricing and additional information!
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Ebara FREX200 CMP
January 1, 2010:
2 Ebara FREX200 Chemical Mechanical Polish tools for immediate sale. OEM inspected and certified! Call for price and details!
Tool configurations:
2 Ebara FREX200 Chemical Mechanical Polish tools for immediate sale. OEM inspected and certified! Call for price and details!
Tool configurations:
| Serial Number | Tool #1 PHB00836EX | Tool #2 PHB00762EX |
| Tool Model | FREX200 | FREX200 |
| Wafer Size | 200mm | 200mm |
| Load Station | ||
| Type | Open Cassette | Open Cassette |
| Number | 4 | 4 |
| Transfer System | ||
| Dry Robot | QTY 1 | QTY 1 |
| Wet Robot | QTY 2 | QTY 2 |
| Notes | high pH resistant handling surfaces | high pH resistant handling surfaces |
| Polishing Stations | ||
| Quanity | 2 | 2 |
| Head Type | High Hole Densitiy(HHD) | High Hole Density on Right Side, AiG2 on Left |
| Platen Type | Alumina(Al2O3) | Alumina on Right, Silicon Carbide on Left |
| Turn Table Rinse | High pressure DI spray bar | High pressure DI spray bar |
| Conditioner Type | 260mm Disk | 260mm Disk |
| Slurry Lines for Polishing | 3 | 3 |
| End Point | Table Current(TCM) | Table Current on Right, Table Current and Eddy Current(RECM) on Left |
| Buff Station | Equipped- Titanium Surface | Equipped- Titanium Surface |
| Slurry Lines for Buff | 1 | 1 |
| First Stage Cleaning Stations | ||
| Quanity | 2 | 2 |
| Type | Dual Roller Brush | Dual Roller Brush |
| Chemical Lines | 2 | 2 |
| Second Stage Cleaning Stations | ||
| Quanity | 2 | 2 |
| Type | Pencil Sponge + Spin/Rinse/Dry | Pencil Sponge + Spin/Rinse/Dry |
| Chemical Lines | 2 | 2 |
| Interface | ||
| Process Monitor | Multi Process Monitor(MPM) | ME-10 Process Monitor |
| Chemical Communication | Equipped | Equipped |
| Integrated Metrology | ||
| Type | Nova 2040 Ready | |
