Updated August 20, 2010
6 Inch Equipment:
Karl Suss 2-6 inch aligners
8 Inch Equipment:
GSD HE 2.5MeV Implanter
PEP L3510
KLA 1280SE
KLA SP1
KLA F5X
KLA P-11
SVG 8800
Nanospec 8000
Semitool Storm
CHA Mark 50
Hitachi 9260 CD-SEM
TEL Alpha 8S (or SE) TEOS furnace with Aera TEOS delivery
3-stack horizontal AP furnace
12 Inch Equipment:
FSI Mercury Zeta G3
ASML Stepper
Please contact us if you have any of the above systems available.