Updated 16-Jan-2012
| Maker | Model | Wafer size |
| TopCon | VI202 | 8" |
| WJ (Aviza) | WJ999R | 6" |
| WJ (Aviza) | WJ1000H | 8" |
| AMAT | Epi | 8" |
| TEL | alpha 8SE Atmospheric Vertical Furnace | 8" |
| Axcelis | GSD 200E, 180kev Implanter | 8" |
| MRL | 3-stack High Temp Oxide Horizontal Furnace | 8" |
| Topcon | Vi 4202 | 8" |
| Camtek | Falcon | 8" |
| Canon | FPA-5500iZ | 8" |
| TEL | 4-stack horizontal Furnace | 6" |
| Poly, Poly, TEOS, BPSG | ||
| Si3N4, Poly, TEOS, BPSG | ||
| any | Solar Simulator for 1Mx4M Substrates | |
| HCT | E500SD Wiresaw | |
| Novellus | Concept 1, Silane | 6" |
| Varian | Kestrel 750 Implanter c/w Tandetron 750kV max | 8" |
Please contact us if you have any of the above systems available.
