WJ1500 system including all support equipment
in excellent condition, was running 200mm wafers
MB, MonoBlok injectors, free floating shields, quick disconnect clamps (option)
Vent spacers for STI and BPTEOS uniformity optimization
Ozone generator-Sorbios
CRS for TEOS, TMB, TMPI (or other dopant sources)
Tylan FC-2960, 260/261 MFC's
SECS II Software
Vintage 2001
contact todd curtis for purchase details, tcurtis@fab-finder.com, 886 2 (0) 938668533 SKYPE todd.orville.curtis
WJ1000 3.1 system including all support equipment
in excellent condition, was running 200mm wafers
MB, MonoBlok injectors
Ozone generator-4 stack Sumitomo
CRS for TEOS, TMB, TMPI (or other dopant sources)
Tylan FC-2960, 260/261 MFC's
SECS II Software
Vintage 1997
Contact Todd Curtis for purchase details
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WJ Process support, integration, and hardware/process R&D
We will provide for FREE, one week of process support at start-up or later, by WJ expert, "CVDWIZARD" with every WJ purchased.
Installation available with expert level WJ experienced engineers, minimum of 10-15yrs. in the field.
